File:10000 EUV photon dose.png
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Summary
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| Description |
English: Dose for 10,000 EUV photons within different diameters. An estimated 2000 photons would be expected in the outermost 10% of the feature width. The table displayed gives a more accurate estimate between the specified inner and outer diameters. According to the Poisson distribution, the standard deviation is the square root of the photon number expected value, or √2000≅45 photons. In a large population of features approaching the normal distribution, one out of a billion features would be more than six standard deviations away from the mean, i.e., 6*√2000/2000≈13%. |
| Date | |
| Source | Excel |
| Author | Guiding light |
Licensing
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at English Wikipedia
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Original upload log
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-02-23 04:47 | 1048×637× (138518 bytes) | Guiding light | Removed redundant columns in table |
| 2015-02-14 09:42 | 1127×683× (155196 bytes) | Guiding light | Changing CD range of shot noise table. |
| 2015-02-14 09:27 | 991×598× (124797 bytes) | Guiding light | Different CD range |
| 2015-02-14 05:22 | 1129×685× (153064 bytes) | Guiding light | change evaluation dose to 40 mJ/cm<sup>2</sup>. |
| 2015-02-08 13:40 | 1023×621× (129200 bytes) | Guiding light | Eliminated redundant columns in table. |
| 2015-02-08 03:12 | 1174×711× (171810 bytes) | Guiding light | Expanded diameter range for shot noise calculations. |
| 2015-02-08 02:52 | 1108×668× (146266 bytes) | Guiding light | Added shot noise calculations of the # photons making up differences in diameters in ~20-30 nm range. |
| 2014-12-26 05:49 | 539×322× (42676 bytes) | Guiding light | Added inset showing edge photon number sensitivity |
| 2014-12-21 14:29 | 480×289× (9646 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 00:24, 19 March 2015 | | 1,048 × 637 (135 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival |
| 00:24, 19 March 2015 |  | 1,127 × 683 (152 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-14 09:42:22 by Guiding light | |
| 00:24, 19 March 2015 |  | 991 × 598 (122 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-14 09:27:40 by Guiding light | |
| 00:24, 19 March 2015 |  | 1,129 × 685 (149 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-14 05:22:21 by Guiding light | |
| 00:24, 19 March 2015 |  | 1,023 × 621 (126 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-08 13:40:04 by Guiding light | |
| 00:24, 19 March 2015 |  | 1,174 × 711 (168 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-08 03:12:36 by Guiding light | |
| 00:24, 19 March 2015 |  | 1,108 × 668 (143 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-02-08 02:52:14 by Guiding light | |
| 00:24, 19 March 2015 |  | 539 × 322 (42 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-26 05:49:12 by Guiding light | |
| 00:24, 19 March 2015 |  | 480 × 289 (9 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-21 14:29:05 by Guiding light | |
| 07:38, 18 March 2015 |  | 1,048 × 637 (135 KB) | Awksauce (talk | contribs) | Transferred from en.wikipedia |
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